Semiconductor Industrial Hygiene Handbook. Monitoring, by Michael E. Williams, David G. Baldwin and Paul C. Manz

By Michael E. Williams, David G. Baldwin and Paul C. Manz (Auth.)

Content material:
Preface

, Pages v-vi
1 - Introduction

, Pages 14-19
2 - commercial Hygiene Monitoring

, Pages 20-103
3 - business Hygiene tracking: actual Agents

, Pages 104-139
4 - Ventilation

, Pages 140-176
5 - own protecting gear (PPE)

, Pages 177-195
6 - Indoor Air caliber (IAQ)

, Pages 196-219
7 - Ergonomics

, Pages 220-243
8 - commercial Hygiene Recordkeeping

, Pages 244-247
9 - Plan Review

, Pages 248-257
Appendix A - Silicon Ingot and Wafer Manufacturing

, Pages 259-266
Appendix B - Silicon gadget production Introduction

, Pages 267-297
Appendix C - III–V (GaAs)

, Pages 298-307
Appendix D - III–V Device

, Pages 308-313
Appendix E - Ion Implanter upkeep protection Considerations

, Pages 314-318
Appendix F - Bibliography

, Pages 319-320
Glossary and Acronyms

, Pages 321-342
Index

, Pages 343-361

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Extra resources for Semiconductor Industrial Hygiene Handbook. Monitoring, Ventilation, Equipment and Ergonomics

Sample text

The fans are generally small and lowpowered making it necessary that the unit be placed close to the work piece, about 4 to 8 inches (100–200 mm). Claims for efficiency of these units should be regarded as suspect. In addition, these units require on-going maintenance involving filter replacement. Although these units are not regarded as a top choice in the elimination of contaminants from the workplace they may be acceptable in some cases where soldering is limited, the Industrial Hygiene Monitoring 53 general room ventilation is adequate, and the unit can be placed close to the work piece.

Industrial Hygiene Monitoring 67 Mass Spectrometry. As shown in Fig. 9, mass spectrometry detectors use a controlled sample draw-line system in conjunction with a mass spectrometer analyzer. A specific air sample volume enters the system’s ionization chamber. The sample molecules are bombarded by electrons, and fragmented into ions. These ions are transported in a beam by electrostatic and magnetic fields and focused in both energy and angle spread. The ions are dispersed according to their mass-to-charge ratio, and directed to either a Faraday cup collector or high sensitivity electron multiplier detector.

Accuracy. The accuracy of this concentration measurement is dependent on: l. The merits of the known calibration standard 2. The repeatability of the detection measurement technique to identical target gas concentrations 3. The complete understanding of response and precision across the entire range of the gas detection measurement instrument 4. The distortion of the measurement caused by interferents If the calibration standard is affected by external factors (for example, variations in output from a gas diffusion tube caused by temperature changes), it may not have the required or assumed concentration value when calibrating the actual gas detection instrument.

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